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Deep, vertical etching for GaAs using inductively coupled plasma/reactive ion etching: Journal of Vacuum Science & Technology B: Vol 38, No 1
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4: RIE etch mechanisms. Plasma etching can be divided into four basic... | Download Scientific Diagram
Effects of combined process of reactive ion etching and dynamic chemical etching on UV laser damage resistance and surface quality of fused silica optics
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Figure 1 from A three-step model of black silicon formation in Deep Reactive Ion Etching process | Semantic Scholar
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Figure 2 from A three-step model of black silicon formation in Deep Reactive Ion Etching process | Semantic Scholar
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ETCHING, Dry Etching, Wet Etching, Plasma Etching, RIBE, Sputter Etching, Ion Milling, RIE - High-K Gate Dielectric Materials: Applications with Advanced Metal Oxide Semiconductor Field Effect
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